JPS56141390U - - Google Patents
Info
- Publication number
- JPS56141390U JPS56141390U JP3947080U JP3947080U JPS56141390U JP S56141390 U JPS56141390 U JP S56141390U JP 3947080 U JP3947080 U JP 3947080U JP 3947080 U JP3947080 U JP 3947080U JP S56141390 U JPS56141390 U JP S56141390U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980039470U JPS6231997Y2 (en]) | 1980-03-27 | 1980-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980039470U JPS6231997Y2 (en]) | 1980-03-27 | 1980-03-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56141390U true JPS56141390U (en]) | 1981-10-26 |
| JPS6231997Y2 JPS6231997Y2 (en]) | 1987-08-15 |
Family
ID=29634925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980039470U Expired JPS6231997Y2 (en]) | 1980-03-27 | 1980-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6231997Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4885438B2 (ja) * | 2003-10-21 | 2012-02-29 | 株式会社日立国際電気 | 基板処理装置並びに基板処理装置用電気ヒーター及びこれを備えた基板処理装置並びに基板処理装置用電気ヒーターにおける発熱体の保持構造及び基板処理装置を用いた半導体装置の製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4839291A (en]) * | 1971-09-25 | 1973-06-09 | ||
| JPS5118966A (ja) * | 1974-08-08 | 1976-02-14 | Yamaha Motor Co Ltd | Kannomagesochi |
| JPS5383150A (en) * | 1976-12-27 | 1978-07-22 | Carborundum Co | Anchoring means for fixing heat insulating member |
-
1980
- 1980-03-27 JP JP1980039470U patent/JPS6231997Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4839291A (en]) * | 1971-09-25 | 1973-06-09 | ||
| JPS5118966A (ja) * | 1974-08-08 | 1976-02-14 | Yamaha Motor Co Ltd | Kannomagesochi |
| JPS5383150A (en) * | 1976-12-27 | 1978-07-22 | Carborundum Co | Anchoring means for fixing heat insulating member |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6231997Y2 (en]) | 1987-08-15 |